Angstrom Advanced AA8000 Multi-function SEM System

Angstrom Advanced AA8000 Multi-function SEM System

www.angstrom-advanced.com

For more information please call Angstrom Advanced at: 781.519.4765

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Introduction

Angstrom Advanced AA8000 SEM is a true multi-purpose, multi-user instrument. It excels in versatility and flexibility by combining high performance in all SEM modes & Particle counter with ease of operation in a multi-user material research environment. This instrument features a perfect balance between stable configuration and an excellent resolution. Angstrom-SEM clearly shows Angstrom’s state-of-art technology. Its rock-solid reliability and fully automated control functions provide customer with the maximum analytical capability. Angstrom-SEM pursues compact SEM design which is great for office environment. Angstrom-SEM provides high scan speed and pixel resolution and high performance control driver with new PCI board. A full set of automated image adjustment functions make it easy for new users to quickly acquire crisp, noise-free images. Even experienced users will benefit from the automated contrast, brightness and focus.

Features

High Performance Field proven image quality Upgraded scan speed and pixel resolution. Wide variety of optional instrument Resolution : 3.0 nm Magnification : ~1,000,000X Display : Photo 4096X 4096 Search : 640X480 30fps Options : BSE / WDS / EDS / EBSD / Etc.

Gun Coumn Gun design for stable current supply Dual field objective lens for spherical Aberration reduction Movable aperture for beam centering Upgraded design of magnetic lens (CL/OL)

Chamber & Stage 5 axis eucentric stage Option: Stage motorization EDS,WDS,CCD, Manipulator etc 50X60X57mm

Detector ET-bar type SE detector SE & BSE double image mode Option: BSE detector

GUI Window based GUI PC controlled operation Image thumbnail & storage Parameter Display

Vacuum System Automatic & Manual control Automatic Safety System R.P+D.P/ R.P+TMP

Image Analyzer Data transfer to Excel Particle counter for blob analysis Multi-focusing & Tiling 3D data view etc

Z ELECTRON OPTIC SYSTEM	Resolution 3.0 nm @30KeV SE/ 4.0nm @BSE Magnification 10 ~ 1,000,000X Image Color Optical Microscope Image (Option) Beam Scan Mode Search, Inspection, Photo (3step) Accelerating Voltage 0.5kV~30kV Electron Gun Type Tungsten Filament Bias System Linked with Acc. Voltage plus continuous voltage control Gun Alignment Pre-centered cartridge Condenser Lens Electromagnetic 2 stages Objective Lens Electromagnetic 1 stages Stigmator 8 Pole Electromagnetic Type Detector Bar Type SE Detector (SE-BSE Conversion Mode Without BSE detector for Non-coating sample inspection) Image Shift 4 Pole Electromagnetic Type Automation Function Auto-Focus, Auto-Stigmatism, Auto Contrast/Brightness, Emission Current etc.
DISPLAY	Frame Memory & Scan Search (640X480) >30 frame/sInspection (1280X960)  30 frame/sPhoto(4096X4096)  2 frame/s
IMAGE ANALYZER	Image Analyzer Particle Counter Multi-Focusing/ Image Tiling/ 3D-View/Enhancement/ Color Transformation/Filters/ Blob Analysis (Single/Multiple/Grouping), Histogram, Excel Data, Point Measurement
STAGE SYSTEM	Movement (X/Y/Z) mm 50/ 60/ 57mm Tilt -30~60° (Max 90 °) Rotation 360° Stage Motorization X,Y,R (Standard) X,Y,Z,Tilt,Rotation (Option)
VACUUM SYSTEM	Vacuum Control Type Full automation with safety system Vacuum System Rotary Pump + Diffusion Pump or Rotary Pump + Turbo Pump (Option)
CONTROL SYSTEM	Computer System Intel Pentium 4(Dual Co-Processor) Memory ≥ 256MB, Control Data Interface Operation System Image Acquisition